12 November 2015 Analytical analysis of a beam flexural-mode piezoelectric actuator for deformable mirrors
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Abstract
A beam flexural-mode piezoelectric bimorph actuator is analyzed based on linear piezoelectricity, and the performance of the actuator is studied. The beam bimorph piezoelectric actuator (BBPA), which is a sandwich compound consisting of a lower and an upper piezoelectric ceramic surface layer and a middle layer made of metal, is driven to flexural deformation. The statistical analytical solution and dynamical solutions from the three-dimensional equations of linear piezoelectricity are derived, and the dependence of the performance upon the physical parameters of the BBPA is evaluated. Numerical results illustrate the strengthened performance achieved by adjusting the geometrical and material parameters of the BBPA.
© 2015 Society of Photo-Optical Instrumentation Engineers (SPIE) 2329-4124/2015/$25.00 © 2015 SPIE
Hairen Wang "Analytical analysis of a beam flexural-mode piezoelectric actuator for deformable mirrors," Journal of Astronomical Telescopes, Instruments, and Systems 1(4), 049001 (12 November 2015). https://doi.org/10.1117/1.JATIS.1.4.049001
Published: 12 November 2015
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CITATIONS
Cited by 9 scholarly publications.
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KEYWORDS
Actuators

Metals

Deformable mirrors

Beam analyzers

Aluminum

Finite element methods

Statistical analysis

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