Optical 3D monitoring VLSI structures

Vladimir P. Tychinsky; Alexander V. Tavrov

doi:10.1117/12.59838

1 June 1992 Optical 3-D monitoring VLSI structures

Vladimir P. Tychinsky, Alexander V. Tavrov

Proceedings Volume 1673, Integrated Circuit Metrology, Inspection, and Process Control VI; (1992) https://doi.org/10.1117/12.59838
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

Phase object pattern analysis has shown the possibility of considerably increasing microscope spatial resolution. Experiments have revealed more than ten times resolution enhancement. Some phase object images inside an Airy disk are presented.

Citation Download Citation

Vladimir P. Tychinsky and Alexander V. Tavrov "Optical 3-D monitoring VLSI structures", Proc. SPIE 1673, Integrated Circuit Metrology, Inspection, and Process Control VI, (1 June 1992); https://doi.org/10.1117/12.59838

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