Fabrication issues in micromachined tunable optical filters

James F. Klemic; J. Marcos Sirota; Mehran Mehregany

doi:10.1117/12.221270

19 September 1995 Fabrication issues in micromachined tunable optical filters

James F. Klemic, J. Marcos Sirota, Mehran Mehregany

Proceedings Volume 2639, Micromachining and Microfabrication Process Technology; (1995) https://doi.org/10.1117/12.221270
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

Prototypes of micromachined tunable infrared optical filters are being produced. Micromachining silicon for use in these filters requires the integration of multilayer dielectric optical coatings such as ZnSe/ThF₄. These coatings are novel materials for integration with microlithographic processing. Devices were engineered and a process flow was developed to avoid contaminating processing tools with the coating. A method for patterning the coating was developed. Low-temperature bonding techniques have been explored and tested. Fabrication issues for these micromachined devices are discussed.

Citation Download Citation

James F. Klemic, J. Marcos Sirota, and Mehran Mehregany "Fabrication issues in micromachined tunable optical filters", Proc. SPIE 2639, Micromachining and Microfabrication Process Technology, (19 September 1995); https://doi.org/10.1117/12.221270

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