End-fire coupling between a buried waveguide structure and a Si photodetector

Bjarke Rose; Otto Leistiko

doi:10.1117/12.236137

25 March 1996 End-fire coupling between a buried waveguide structure and a Si photodetector

Bjarke Rose, Otto Leistiko

Proceedings Volume 2686, Integrated Optics and Microstructures III; (1996) https://doi.org/10.1117/12.236137
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

In this paper a new integrated optical chip containing silica-on-silicon waveguides end-fire coupled to micromachined silicon mesa photodiodes is presented. Contrary to similar devices presented in the literature, buried waveguide structures with a total glass thickness of 15 micrometer have been used, which has considerable potential for new and interesting applications. Unlike the conventional surface-illuminated photodiode, the light is coupled in parallel to the junction in these devices. This configuration results in several advantages, two of which are improved spectral, as well as high frequency response. For the first test series reported here, the aim was high quantum efficiency, thus, lowly doped n-type substrates leading to long diffusion lengths of holes were selected. This leads to low frequency response and a quantum efficiency almost insensitive to reverse bias, due to the very long diffusion lengths of carriers in lowly doped material. Propagation loss for the multimode waveguides was less than 0.5 dB/cm for lambda greater than 700 nm. The dark current of the photodiodes was less than 100 pA and the breakdown voltage above 200 V. In a spectral range from 500 - 1000 nm, the devices showed very flat response with quantum efficiencies up to 82%. In the work now in progress, a p-i-n structure will be used, in order to optimize both bandwidth and quantum efficiency.

Citation Download Citation

Bjarke Rose and Otto Leistiko "End-fire coupling between a buried waveguide structure and a Si photodetector", Proc. SPIE 2686, Integrated Optics and Microstructures III, (25 March 1996); https://doi.org/10.1117/12.236137

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available