PROCEEDINGS VOLUME 6109
MOEMS-MEMS 2006 MICRO AND NANOFABRICATION | 21-27 JANUARY 2006
Micromachining and Microfabrication Process Technology XI
Editor Affiliations +
IN THIS VOLUME

6 Sessions, 26 Papers, 0 Presentations, 0 Posters
Devices I  (2)
Devices II  (7)
MOEMS-MEMS 2006 MICRO AND NANOFABRICATION
21-27 January 2006
San Jose, California, United States
Devices I
Alfredo M. Morales, Blake A. Simmons, Thomas I. Wallow, K. Jeffery Campbell, Seethambal S. Mani, Brita Mittal, Robert W. Crocker, Eric B. Cummings, Rafael V. Davalos, et al.
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 610901 (2006) https://doi.org/10.1117/12.648135
R. J. Fasching, S.-J. Bai, T. Fabian, F. B. Prinz
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 610902 (2006) https://doi.org/10.1117/12.648950
Devices II
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 610903 (2006) https://doi.org/10.1117/12.647154
Jeongsik Sin, Woo Ho Lee, Dan Popa, Harry E. Stephanou
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 610904 (2006) https://doi.org/10.1117/12.643872
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 610905 (2006) https://doi.org/10.1117/12.645076
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 610906 (2006) https://doi.org/10.1117/12.646846
Samir Ilias, Francis Picard, Patrice Topart, Carl Larouche, Hubert Jerominek
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 610907 (2006) https://doi.org/10.1117/12.648409
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 610908 (2006) https://doi.org/10.1117/12.644486
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 610909 (2006) https://doi.org/10.1117/12.647115
Fabrication Techniques I
Jeremy A. Palmer, John D. Williams, Tom Lemp, Tom M. Lehecka, Francisco Medina, Ryan B. Wicker
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 61090A (2006) https://doi.org/10.1117/12.641244
Christopher J. Robinson, Larinn M. Southwell, Jeremy A. Palmer, Mark W. Smith, Michael B. Sinclair, Bart D. Chavez, Brent E. Stucker, Francisco Medina, Ryan B. Wicker
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 61090B (2006) https://doi.org/10.1117/12.646417
Suhas P. Deshmukh, Shashikant Dubey, P. S. Gandhi
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 61090C (2006) https://doi.org/10.1117/12.645856
Fabrication Techniques II
Srimath S. Subasinghe, Abhijat Goyal, Srinivas A. Tadigadapa
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 61090D (2006) https://doi.org/10.1117/12.657751
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 61090E (2006) https://doi.org/10.1117/12.645835
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 61090F (2006) https://doi.org/10.1117/12.646352
Katsuhiko Fukunaga, Jun Suda, Tsunenobu Kimoto
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 61090G (2006) https://doi.org/10.1117/12.647116
Metrology and Test
Yasser H. Anis, James K. Mills, William L. Cleghorn
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 61090H (2006) https://doi.org/10.1117/12.646991
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 61090I (2006) https://doi.org/10.1117/12.646498
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 61090J (2006) https://doi.org/10.1117/12.639267
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 61090K (2006) https://doi.org/10.1117/12.641154
Poster Session
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 61090L (2006) https://doi.org/10.1117/12.637455
Yuhua Guo, Gang Liu, Yangchao Tian
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 61090M (2006) https://doi.org/10.1117/12.643650
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 61090N (2006) https://doi.org/10.1117/12.644423
Y. R. Huang, H. M. Tai, H. P. Chou
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 61090O (2006) https://doi.org/10.1117/12.645214
K. Yamanouchi, Y. Satoh, H. Isono, D. Kawasaki
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 61090P (2006) https://doi.org/10.1117/12.645639
M. Brunet, P. Dubreuil, E. Scheid, J-L. Sanchez
Proceedings Volume Micromachining and Microfabrication Process Technology XI, 61090Q (2006) https://doi.org/10.1117/12.646121
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