MOSCAP and 3D taper

David J. Thomson; Weiwei Zhang; Martin Ebert; Ke Li; Jamie Reynolds; Bigeng Chen; Xingzhao Yan; Han Du; Mehdi Banakar; Ying Tran; Callum Littlejohns; Graham Reed

doi:10.1117/12.2605906

5 March 2022 MOSCAP and 3D taper

David J. Thomson, Weiwei Zhang, Martin Ebert, Ke Li, Jamie Reynolds, Bigeng Chen, Xingzhao Yan, Han Du, Mehdi Banakar, Ying Tran, Callum Littlejohns, Graham Reed

Author Affiliations +

Proceedings Volume PC12006, Silicon Photonics XVII; PC1200602 (2022) https://doi.org/10.1117/12.2605906
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

High speed optical modulators are important for a number of applications served by silicon photonics. Here we present our recent work towards high speed free carrier accumulation based optical modulators where a high speed and efficient operation is achieved. Such silicon optical modulators typically need to be built in sub-micrometre sized waveguides which are challenging to couple light to and from. Also presented are experimental results from a buried 3D-taper that is able to couple efficiently between a waveguide of height ~1.5um and a 220nm high waveguide. Losses below 0.6dB are achieved limited by the loss of the material used.

Conference Presentation

Citation Download Citation

David J. Thomson, Weiwei Zhang, Martin Ebert, Ke Li, Jamie Reynolds, Bigeng Chen, Xingzhao Yan, Han Du, Mehdi Banakar, Ying Tran, Callum Littlejohns, and Graham Reed "MOSCAP and 3D taper", Proc. SPIE PC12006, Silicon Photonics XVII, PC1200602 (5 March 2022); https://doi.org/10.1117/12.2605906

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