Laser technologies for the production of microLEDs for next-generation displays

Uwe Wagner; René Liebers; Mandy Gebhardt

doi:10.1117/12.2610095

9 March 2022 Laser technologies for the production of microLEDs for next-generation displays

Uwe Wagner, René Liebers, Mandy Gebhardt

Proceedings Volume PC12024, Advances in Display Technologies XII; PC1202404 (2022) https://doi.org/10.1117/12.2610095
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

MicroLEDs have a tremendous potential for future displays. However, there are several technical challenges to overcome prior to widespread deployment of MicroLEDs. One key hurdle is developing a process to release the dies from the sapphire growth wafer. Another is a process to transfer these to the display substrate with micron level precision and reliability. Laser processing offers several opportunities for MicroLED display production, such as Laser Lift-Off (LLO) to separate the finished MicroLEDs from the sapphire growth wafer and Laser Induced Forward Transfer (LIFT) to move the devices from a donor to the substrate. In this presentation, laser-based system solutions for the different manufacturing steps for MicroLEDs, will be presented. Integrated process control and monitoring is used to assure stable and reliable operation to ensure high throughput and low yield losses.

Conference Presentation

Citation Download Citation

Uwe Wagner, René Liebers, and Mandy Gebhardt "Laser technologies for the production of microLEDs for next-generation displays", Proc. SPIE PC12024, Advances in Display Technologies XII, PC1202404 (9 March 2022); https://doi.org/10.1117/12.2610095

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