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17 March 2023 Ultrafast nanostructuring utilizing interference techniques and plasmonic effects
Jürgen Ihlemann, Jens Oltmanns, Frederick Kleinwort, Jan-Hendrik Klein-Wiele, Peter Simon
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Proceedings Volume PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII; PC124080B (2023) https://doi.org/10.1117/12.2651272
Event: SPIE LASE, 2023, San Francisco, California, United States
Abstract
Ultrafast laser interference ablation leads to deterministic, strictly periodic patterns on metals and semiconductors with periods down to a few 100 nm. Manipulation of the interfering partial beams enable a variety of surface patterns with applications in photonics, fraud protection, electronics, fluidics, tribology, and medicine. Under suitable excitation conditions, a single beam may generate a surface plasmon polariton (SPP) and their interference may create a periodic surface pattern as well. Specific beam shaping may compensate the strong SPP attenuation leading to homogeneous patterns with a single laser pulse.
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Jürgen Ihlemann, Jens Oltmanns, Frederick Kleinwort, Jan-Hendrik Klein-Wiele, and Peter Simon "Ultrafast nanostructuring utilizing interference techniques and plasmonic effects", Proc. SPIE PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, PC124080B (17 March 2023); https://doi.org/10.1117/12.2651272
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KEYWORDS
Nanostructuring
Ultrafast phenomena
Plasmonics
Nanostructures
Photonics
Polarization
Pulsed laser operation
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