Microvibration Measurement Using Laser Beams

Y. Fujimori; T. Komatsu; N. Hoshina

doi:10.1117/12.957567

27 July 1979 Microvibration Measurement Using Laser Beams

Y. Fujimori, T. Komatsu, N. Hoshina

Proceedings Volume 0189, 13th Intl Congress on High Speed Photography and Photonics; (1979) https://doi.org/10.1117/12.957567
Event: 13th International Congress on High Speed Photography and Photonics, 1978, Tokyo, Japan

Abstract

A microvibration measuring apparatus for an ultrasonic welding tool was newly designed. This apparatus enabled non-contact, highly sensitive measurement free from floor vibration. It consists of a low power He-Ne laser, converging optics and a detector followed by electronic circuits. Even when horizontal floor vibration amplitude was as much as 20 μm, the minimum detectable amplitude of the apparatus was below 0.1 μm. By free vibration measurements, a 200 cps difference was found between maximum amplitude frequency and an electro-mechanical matching frequency. An amplitude output difference was found even in the same kind of welders. By vibration measurements during welding, it was found that vibration amplitude stability became worse.

Citation Download Citation

Y. Fujimori, T. Komatsu, and N. Hoshina "Microvibration Measurement Using Laser Beams", Proc. SPIE 0189, 13th Intl Congress on High Speed Photography and Photonics, (27 July 1979); https://doi.org/10.1117/12.957567

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