Microwave Curing: Is It A Reality?

Mary Ann Hockey

doi:10.1117/12.931892

28 July 1981 Microwave Curing: Is It A Reality?

Mary Ann Hockey

Proceedings Volume 0275, Semiconductor Microlithography VI; (1981) https://doi.org/10.1117/12.931892
Event: 1981 Microlithography Conferences, 1981, San Jose, United States

Abstract

The curing or prebaking of photoresist-coated substrates using microwave radiation has several characteristics that are useful when processing LSI circuits. Some properties of microwave energy, the process results obtained with its utilization, and the advantages for photoresist baking will be presented.

Citation Download Citation

Mary Ann Hockey "Microwave Curing: Is It A Reality?", Proc. SPIE 0275, Semiconductor Microlithography VI, (28 July 1981); https://doi.org/10.1117/12.931892

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