Paper
27 May 1982 Textured Optical Storage Media
H. G. Craighead, R. E. Howard, R. W. Smith, D. A. Snyder
Author Affiliations +
Proceedings Volume 0329, Optical Disk Technology; (1982) https://doi.org/10.1117/12.933395
Event: 1982 Los Angeles Technical Symposium, 1982, Los Angeles, United States
Abstract
A class of optical storage media is described which consists of thin films, microscopically textured by reactive ion etching. These surfaces have random arrays of decoupled columns or cones with cross-sectional dimensions less than 100 nm. This structure yields a spatially varying, graded refractive index resulting in low specular reflectance for visible wavelengths. Reflective spots ~1 μm in diameter have been produced on the surfaces by local melting with a low power laser beam. This has been demonstrated for highly stable materials such as Si and Ge with threshold energies as low as ~1 nJ. The fabrication, microstructure, writing parameters and encapsulation of the media are discussed.
© (1982) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. G. Craighead, R. E. Howard, R. W. Smith, and D. A. Snyder "Textured Optical Storage Media", Proc. SPIE 0329, Optical Disk Technology, (27 May 1982); https://doi.org/10.1117/12.933395
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Cited by 2 scholarly publications.
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KEYWORDS
Germanium

Reflectivity

Silicon

Optical storage

Photomicroscopy

Reactive ion etching

Optical discs

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