Influence Of Various Electro-Attractive Substituents On The Performances Of Acrylic Type Positive Resists In Microlithography.

B. Serre; F. Schue; A. Eranian; E. Datamanti; J. c. Dubois; C. Montginoul; L. Giral

doi:10.1117/12.935112

7 November 1983 Influence Of Various Electro-Attractive Substituents On The Performances Of Acrylic Type Positive Resists In Microlithography.

B. Serre, F. Schue, A. Eranian, E. Datamanti, J. c. Dubois, C. Montginoul, L. Giral

Author Affiliations +

Proceedings Volume 0393, Electron-Beam, X-Ray and Ion-Beam Techniques for Submicron Lithographies II; (1983) https://doi.org/10.1117/12.935112
Event: 1983 Microlithography Conferences, 1983, Santa Clara, United States

Abstract

The influence of two kinds of electro-attractive substituents on acrylic type positive resists upon the sensitivity on electrons or soft x-rays (λ = 13.34 Å) was studied. - Fluorine atoms were incorporated into the poly(alkylmethacrylate) ester chain. - Cyano group was substituted to methyl group bonded to the polymethacrylate quaternary carbon atom. The results were interpreted on the basis of the modified relationships of KU and SCALA, SPEARS and SMITH, giving the incident dose for an electron beam and x-ray irradiation respectively.

Citation Download Citation

B. Serre, F. Schue, A. Eranian, E. Datamanti, J. c. Dubois, C. Montginoul, and L. Giral "Influence Of Various Electro-Attractive Substituents On The Performances Of Acrylic Type Positive Resists In Microlithography.", Proc. SPIE 0393, Electron-Beam, X-Ray and Ion-Beam Techniques for Submicron Lithographies II, (7 November 1983); https://doi.org/10.1117/12.935112

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available