Synchrotron Radiation X-Ray Lithography: Recent Results

Jerome P. Silverman; Rolf P Haelbich; John M Warlaumont

doi:10.1117/12.939206

19 March 1984 Synchrotron Radiation X-Ray Lithography: Recent Results

Jerome P. Silverman, Rolf P Haelbich, John M Warlaumont

Proceedings Volume 0448, X-Ray Lithography and Applications of Soft X-Rays to Technology; (1984) https://doi.org/10.1117/12.939206
Event: 27th Annual Technical Symposium, 1983, San Diego, United States

Abstract

A beamline for making X-ray lithography exposures using synchrotron radiation has been built and is now in routine operation at Brookhaven National Laboratory. The beamline, its optics, and its control system are described, and results are presented showing the intensity and uniformity of the radiation at the wafer. Results of exposures in a variety of resists are shown and discussed.

Citation Download Citation

Jerome P. Silverman, Rolf P Haelbich, and John M Warlaumont "Synchrotron Radiation X-Ray Lithography: Recent Results", Proc. SPIE 0448, X-Ray Lithography and Applications of Soft X-Rays to Technology, (19 March 1984); https://doi.org/10.1117/12.939206

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