Metal Deposition By Laser Driven Pyrolysis Of Solid Organometallic Films

R Y Jan; S D Allen

doi:10.1117/12.939438

14 June 1984 Metal Deposition By Laser Driven Pyrolysis Of Solid Organometallic Films

R Y Jan, S D Allen

Proceedings Volume 0459, Laser-Assisted Deposition, Etching, and Doping; (1984) https://doi.org/10.1117/12.939438
Event: 1984 Los Angeles Technical Symposium, 1984, Los Angeles, United States

Abstract

The localized deposition of metal and metal oxide films by laser thermal decomposition of a solid organometallic film has been investigated. Several different laser sources have been used to irradiate commercially available organometallic resinate films applied using standard photoresist techniques on glass and quartz substrates. The focused laser causes localized decomposition of the organometallic film and the unreacted film is removed with solvent. Decomposition occurs stepwise with the initial state being insoluble but opaque and nonconducting. Continued irradiation results in metallic appearing films. Film dimensions considerably less than the laser spot diameter could be be produced under appropriate irradiation conditions.

Citation Download Citation

R Y Jan and S D Allen "Metal Deposition By Laser Driven Pyrolysis Of Solid Organometallic Films", Proc. SPIE 0459, Laser-Assisted Deposition, Etching, and Doping, (14 June 1984); https://doi.org/10.1117/12.939438

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