The Growth Of Platinum Nickel Silicide By Thermal Anneal Of An Alloy Film On Silicon

Alan E. Morgan; William T. Stacy; Russell C Ellwanger; Yde Tamminga

doi:10.1117/12.941344

31 May 1984 The Growth Of Platinum Nickel Silicide By Thermal Anneal Of An Alloy Film On Silicon

Alan E. Morgan, William T. Stacy, Russell C Ellwanger, Yde Tamminga

Proceedings Volume 0463, Advanced Semiconductor Processing/Characterization of Electronic/Optical Materials; (1984) https://doi.org/10.1117/12.941344
Event: 1984 Los Angeles Technical Symposium, 1984, Los Angeles, United States

Abstract

The formation of platinum nickel silicide has been studied by sputter depositing a 600 Å Pt.₄Ni.₆ alloy layer onto (111) n-type Si and annealing for 20 min. in N2 at tempera-tures between 300 and 750°C. RBS, AES and cross-sectional STEM/EDS were used for character-ization. The ternary silicide develops as a two or three layer structure and only at the higher temperatures does a uniform Pt₄Ni.₆Si layer result. An interfacial monosilicide layer containing mostly Ni is present throughout the growth sequence. The silicide growth mechanism can be understood in terms of metal atom diffusion with the preferential bonding of Si to Pt leaving Ni to diffuse deeper into the Si substrate.

Citation Download Citation

Alan E. Morgan, William T. Stacy, Russell C Ellwanger, and Yde Tamminga "The Growth Of Platinum Nickel Silicide By Thermal Anneal Of An Alloy Film On Silicon", Proc. SPIE 0463, Advanced Semiconductor Processing/Characterization of Electronic/Optical Materials, (31 May 1984); https://doi.org/10.1117/12.941344

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available