Grating Interferometry For Positioning The X-Y Stages Of A Wafer Stepper

L. Berger

doi:10.1117/12.944823

12 December 1984 Grating Interferometry For Positioning The X-Y Stages Of A Wafer Stepper

L. Berger

Proceedings Volume 0503, Application, Theory, and Fabrication of Periodic Structures, DiffractionGratings, and Moire Phenomena II; (1984) https://doi.org/10.1117/12.944823
Event: 28th Annual Technical Symposium, 1984, San Diego, United States

Abstract

This paper relates the performances of an interferometry based upon a bidimensional grating taken as a reference. This interferometry permits to position the X-Y stage of a wafer stepper with a resolution comparable with a laser interferometer. The principle and the performances of an X-Y table controlled by this interferometer are presented.

Citation Download Citation

L. Berger "Grating Interferometry For Positioning The X-Y Stages Of A Wafer Stepper", Proc. SPIE 0503, Application, Theory, and Fabrication of Periodic Structures, DiffractionGratings, and Moire Phenomena II, (12 December 1984); https://doi.org/10.1117/12.944823

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