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3 September 1985 Scanning Electron Microscopy Studies Of Laser Damage Initiating Defects In ZnSe/ThF4 And SiH/Si02 Multilayer Coatings
L. F. Johnson, E. J. Ashley, T. M. Donovan, J. B. Franck, R. W. Woolever, R. Z. Dalbey
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Proceedings Volume 0525, Measurement and Effects of Surface Defects & Quality of Polish; (1985) https://doi.org/10.1117/12.946354
Event: 1985 Los Angeles Technical Symposium, 1985, Los Angeles, United States
Abstract
Scanning electron microscopy (SEM) was used to identify four distinct laser damage mor-phologies in ZnSe/ThF4 multilayer mirrors. There were three types of defect-initiated damage morphologies. Oblong-shaped damage sites oriented perpendicular to the electric field vector of the laser were associated with particulates on or near the surface of the ZnSe/ThF4 multilayers. Circular-shaped damage sites were initiated by particulates embed-ded beneath the top ZnSe layer. Selective laser damage at pinholes was identified as the third defectinitiated damage morphology. In addition to defect-initiated damage, stress-related damage was indicated by cracks near or within laser damage craters and erosion sites. Selective laser damage at nodular growth defects in SiH/Si02 multilayers was also observed using SEM. Samples with different numbers of nodules were prepared in-house using RF-diode, reactive sputtering. The low-defect mirror had the highest laser damage onset, and the mirror with the highest number of nodules had the lowest laser damage onset.
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L. F. Johnson, E. J. Ashley, T. M. Donovan, J. B. Franck, R. W. Woolever, and R. Z. Dalbey "Scanning Electron Microscopy Studies Of Laser Damage Initiating Defects In ZnSe/ThF4 And SiH/Si02 Multilayer Coatings", Proc. SPIE 0525, Measurement and Effects of Surface Defects & Quality of Polish, (3 September 1985); https://doi.org/10.1117/12.946354
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KEYWORDS
Laser induced damage
Multilayers
Mirrors
Scanning electron microscopy
Polishing
Surface finishing
Optical coatings
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