Statistical And Signal Processing Concepts In Surface Metrology

E L Church; P. Z. Takacs

doi:10.1117/12.964495

3 November 1986 Statistical And Signal Processing Concepts In Surface Metrology

E L Church, P. Z. Takacs

Proceedings Volume 0645, Optical Manufacturing, Testing and Aspheric Optics; (1986) https://doi.org/10.1117/12.964495
Event: 1986 Technical Symposium Southeast, 1986, Orlando, United States

Abstract

This paper proposes the use of a simple two-scale model of surface roughness for testing and specifying the topographic figure and finish of synchrotron-radiation mirrors. In this approach the effects of figure and finish are described in terms of their slope distribution and per spectrum, respectively, which are then combined with the system point spread function to produce a composite image. The result can be used to predict mirror performance or to translate design requirements into manufacturing specifications. Pacing problems in this approach are the development of a practical long-trace slope-profiling instrument and realistic statistical models for figure and finish errors.

Citation Download Citation

E L Church and P. Z. Takacs "Statistical And Signal Processing Concepts In Surface Metrology", Proc. SPIE 0645, Optical Manufacturing, Testing and Aspheric Optics, (3 November 1986); https://doi.org/10.1117/12.964495

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available