Heterodyne Interferometer For Surface Profile Measurements In The Angstrom Region

Dan Pantzer; Jacob Politch; Leif Ek

doi:10.1117/12.938482

20 October 1986 Heterodyne Interferometer For Surface Profile Measurements In The Angstrom Region

Dan Pantzer, Jacob Politch, Leif Ek

Proceedings Volume 0656, Contemporary Optical Instrument Design, Fabrication, and Testing; (1986) https://doi.org/10.1117/12.938482
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

A fast and versatile interferometric system for measuring surface profiles of flat optical surfaces without the need of a separate reference surface will be presented. The instrument is capable of resolving height variations of about 50 Å, while lateral resolution is 3 m. The profile measurement takes 20 seconds, and statistical properties like rms height, slope and spectral density can be calculated from the profile. No extensive alignment of the sample is needed, and scan lengths of 100 micrometers to several millimeters are obtainable.

Citation Download Citation

Dan Pantzer, Jacob Politch, and Leif Ek "Heterodyne Interferometer For Surface Profile Measurements In The Angstrom Region", Proc. SPIE 0656, Contemporary Optical Instrument Design, Fabrication, and Testing, (20 October 1986); https://doi.org/10.1117/12.938482

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