Automatic, Transparent, Thin-Film-Thickness Inspection System For Complex-Shapes

Harry S Corey

doi:10.1117/12.938782

23 October 1986 Automatic, Transparent, Thin-Film-Thickness Inspection System For Complex-Shapes

Harry S Corey

Proceedings Volume 0665, Optical Techniques for Industrial Inspection; (1986) https://doi.org/10.1117/12.938782
Event: 1986 Quebec Symposium, 1986, Quebec City, Canada

Abstract

An automatic, transparent, thin-film-thickness inspection system for complex shapes is discussed. The basic elements of the system are a light section microscope (LSM) used to produce an optical signal proportional to the film thickness and a multiple-axes robot used to automatically position the LSM at the desired inspection points. The system measures film thickness from 0.013 to 0.250 mm (0.0005 to 0.010 in.) and has a repeatability of +0.003 mm (+0.0001 in.). The major development efforts consisted of (1) designing a vision system for theLSM, (2) providing for automatic read-out of the film-thickness data, and (3) final positioning of the LSM using the viewed optical patterns. Also, a simple standard was designed and fabricated that provides for traceability to the National Bureau of Standards (NBS) using a coordinate measuring machine. The completed inspection system has been installed in a production shop.

Citation Download Citation

Harry S Corey "Automatic, Transparent, Thin-Film-Thickness Inspection System For Complex-Shapes", Proc. SPIE 0665, Optical Techniques for Industrial Inspection, (23 October 1986); https://doi.org/10.1117/12.938782

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