Paper
10 July 1987 Excimer Lasers
Robert C. Sze
Author Affiliations +
Proceedings Volume 0701, 1986 European Conf on Optics, Optical Systems and Applications; (1987) https://doi.org/10.1117/12.937034
Event: 1986 International European Conference on Optics, Optical Systems, and Applications, 1986, Florence, Italy
Abstract
A history of excimer laser discharge techniques is discussed. Emphasis is placed on techniques required for dependable, long-lived, commercial devices.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert C. Sze "Excimer Lasers", Proc. SPIE 0701, 1986 European Conf on Optics, Optical Systems and Applications, (10 July 1987); https://doi.org/10.1117/12.937034
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KEYWORDS
Excimer lasers

Pulsed laser operation

Laser systems engineering

Switches

Capacitors

Magnetism

Laser development

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