High Resolution Optical Metrology And Edge Detection Using A Pc-Controlled Smart CCD Camera

M. T. Gale; P. Seitz

doi:10.1117/12.937063

10 July 1987 High Resolution Optical Metrology And Edge Detection Using A Pc-Controlled Smart CCD Camera

M. T. Gale, P. Seitz

Proceedings Volume 0701, 1986 European Conf on Optics, Optical Systems and Applications; (1987) https://doi.org/10.1117/12.937063
Event: 1986 International European Conference on Optics, Optical Systems, and Applications, 1986, Florence, Italy

Abstract

The excellent properties of a PC-controlled smart CCD camera have been combined with a novel digital edge localization algorithm to produce a high-resolution instrument for optical metrology with the capability of determining edge positions to better than 1% of the pixel dimensions.

Citation Download Citation

M. T. Gale and P. Seitz "High Resolution Optical Metrology And Edge Detection Using A Pc-Controlled Smart CCD Camera", Proc. SPIE 0701, 1986 European Conf on Optics, Optical Systems and Applications, (10 July 1987); https://doi.org/10.1117/12.937063

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