Silicon-On-Sapphire Waveguides

D. J. Albares; R. A. Soref

doi:10.1117/12.937191

10 March 1987 Silicon-On-Sapphire Waveguides

D. J. Albares, R. A. Soref

Proceedings Volume 0704, Integrated Optical Circuit Engineering IV; (1987) https://doi.org/10.1117/12.937191
Event: Cambridge Symposium-Fiber/LASE '86, 1986, Cambridge, MA, United States

Abstract

The first silicon-on-sapphire optical waveguides have been demonstrated. Waveguiding at λ=1.3 microns has been observed in silicon films 0.95 and 1.5 microns thick and in raised strip structures 1.5 microns thick.

Citation Download Citation

D. J. Albares and R. A. Soref "Silicon-On-Sapphire Waveguides", Proc. SPIE 0704, Integrated Optical Circuit Engineering IV, (10 March 1987); https://doi.org/10.1117/12.937191

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