Measurement Facilities On A Laser Ionization Mass Spectrometer

A. Czitrovszky; P. Jani; P. Juhasz; A. Vertes

doi:10.1117/12.975602

17 September 1987 Measurement Facilities On A Laser Ionization Mass Spectrometer

A. Czitrovszky, P. Jani, P. Juhasz, A. Vertes

Proceedings Volume 0811, Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection; (1987) https://doi.org/10.1117/12.975602
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

Basic parameters of a laser ionization time of flight mass spectrometer (LI-TOF-MS) developed for the microelectronic industry are discussed. The system consists of three parts i.e. optical system, the TilF mass spectrometer with ion reflector and the data acquisition and evaluation system. Laboratory experiments were carried out on carbon foils for calibration purposes.

Citation Download Citation

A. Czitrovszky, P. Jani, P. Juhasz, and A. Vertes "Measurement Facilities On A Laser Ionization Mass Spectrometer", Proc. SPIE 0811, Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (17 September 1987); https://doi.org/10.1117/12.975602

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