Surface Correlation Function Analysis Of High Resolution Scattering Data From Mirrored Surfaces Obtained Using A Triple-Axis X-Ray Diffractometer

Finn E. Christensen; A. Hornstrup; Herbert W. Schnopper

doi:10.1117/12.942161

9 August 1988 Surface Correlation Function Analysis Of High Resolution Scattering Data From Mirrored Surfaces Obtained Using A Triple-Axis X-Ray Diffractometer

Finn E. Christensen, A. Hornstrup, Herbert W. Schnopper

Author Affiliations +

Proceedings Volume 0830, Grazing Incidence Optics for Astronomical and Laboratory Applications; (1988) https://doi.org/10.1117/12.942161
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

Within various x-ray programs there exists a need for a detailed investigation of the surface roughness of mirrored surfaces over a wide spatial wavelength bandwidth, ranging from large scale figure error to microroughness. A number of methods exist to measure the surface roughness. Common to all methods is that they are bandwidth-limited. A crucial point in the analysis of data is, therefore, to specify accurately the wavelength bandwidth limitation and to determine the surface autocorrelation function within this band-width. We present a number of scattering measurements obtained using a triple-axis perfect-crystal x-ray diffractometer and the results of an autocorrelation function analysis. Furthermore, we present some measurements of integrated reflectivity, which we believe provide evidence for microroughness in the range from a few angstroms to tens of microns.

Citation Download Citation

Finn E. Christensen, A. Hornstrup, and Herbert W. Schnopper "Surface Correlation Function Analysis Of High Resolution Scattering Data From Mirrored Surfaces Obtained Using A Triple-Axis X-Ray Diffractometer", Proc. SPIE 0830, Grazing Incidence Optics for Astronomical and Laboratory Applications, (9 August 1988); https://doi.org/10.1117/12.942161

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available