Spatial Resolution And Absolute Wavelength Values Through 2D X-Ray Spectroscopy

Benjamin S. Fraenkel; Zwi H. Kalman

doi:10.1117/12.965027

4 February 1988 Spatial Resolution And Absolute Wavelength Values Through 2D X-Ray Spectroscopy

Benjamin S. Fraenkel, Zwi H. Kalman

Proceedings Volume 0831, X-Rays from Laser Plasmas; (1988) https://doi.org/10.1117/12.965027
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

Double reflections in single crystals and in two crystals in series may be used to obtain monochromatic x-ray images of x-ray sources. Thus ion distributions of the various ions in laser produced plasmas and other hot plasmas may be obtained. Moreover, strictly monochromatic parallel beams of x-rays, produced with this method from e.g. a synchroton source, may he used for lithography, with the mask not necessarily in close contact with the photoresist. The beam will be parallel enough not to be broadened by the distance between them. Theory yields a spatial resolution of 100Å at 1.5 wavelength, with the distance between mask and photoresist of about 1 mm. Similar results with two crystals in series may be obtained, if the two planes of reflection, each containing the incoming and outgoing beam, are not parallel. The angular broadening of a monochromatic beam obtained by either method of double reflection is given as function of diffraction width of the second reflecting crystal plane and of the angle between the planes of reflection.

Citation Download Citation

Benjamin S. Fraenkel and Zwi H. Kalman "Spatial Resolution And Absolute Wavelength Values Through 2D X-Ray Spectroscopy", Proc. SPIE 0831, X-Rays from Laser Plasmas, (4 February 1988); https://doi.org/10.1117/12.965027

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