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The work done on the synthesis of metal silicides by using different pulsed lasers (ruby, Nd:glass, excimer) is presented and discussed. We found that excimer lasers offer much better characteristics for annealing of metal/silicon systems in comparison to solid state lasers.
A. Luches,E. D'Anna,G. Leggieri, andM. R. Perrone
"Metal-Silicon Reactions With Laser Pulses", Proc. SPIE 0952, Laser Technologies in Industry, (16 January 1988); https://doi.org/10.1117/12.968898
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A. Luches, E. D'Anna, G. Leggieri, M. R. Perrone, "Metal-Silicon Reactions With Laser Pulses," Proc. SPIE 0952, Laser Technologies in Industry, (16 January 1988); https://doi.org/10.1117/12.968898