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The papers in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. Additional papers and presentation recordings may be available online in the SPIE Digital Library at SPIEDigitalLibrary.org. The papers reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon. Please use the following format to cite material from these proceedings: Author(s), 'Title of Paper,” in Laser-based Micro- and Nanoprocessing XI, edited by Udo Klotzbach, Kunihiko Washio, Rainer Kling, Proceedings of SPIE Vol. 10092 (SPIE, Bellingham, WA, 2017) Seven-digit Article CID Number. ISSN: 0277-786X ISSN: 1996-756X (electronic) ISBN: 9781510606258 ISBN: 9781510606265 (electronic) Published by SPIE P.O. Box 10, Bellingham, Washington 98227-0010 USA Telephone +1 360 676 3290 (Pacific Time) · Fax +1 360 647 1445 Copyright © 2017, Society of Photo-Optical Instrumentation Engineers. Copying of material in this book for internal or personal use, or for the internal or personal use of specific clients, beyond the fair use provisions granted by the U.S. Copyright Law is authorized by SPIE subject to payment of copying fees. The Transactional Reporting Service base fee for this volume is $18.00 per article (or portion thereof), which should be paid directly to the Copyright Clearance Center (CCC), 222 Rosewood Drive, Danvers, MA 01923. Payment may also be made electronically through CCC Online at copyright.com. Other copying for republication, resale, advertising or promotion, or any form of systematic or multiple reproduction of any material in this book is prohibited except with permission in writing from the publisher. The CCC fee code is 0277-786X/17/$18.00. Printed in the United States of America. Paper Numbering: Proceedings of SPIE follow an e-First publication model. A unique citation identifier (CID) number is assigned to each article at the time of publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online and print versions of the publication. SPIE uses a seven-digit CID article numbering system structured as follows:
AuthorsNumbers in the index correspond to the last two digits of the six-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first four digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B…0Z, followed by 10-1Z, 20-2Z, etc. Aalderink, Dennis, 04 Akkerman, H. B., 0I Alal, Orhan, 1J Alamri, Sabri, 14, 19 Albrecht, Hans-Stephan, 15 Ancona, Antonio, 0F Angelini, A., 0A Assaf, Youssef, 0X B. S. Sampaio, Daniel J., 0E Babin, Sergey A., 1H Baselt, Tobias, 1T Bayer, L., 1P Bernard, Benjamin, 05 Bieda, Matthias, 11 Boarino, L., 0A Bonse, Jörn, 0N Bragin, Igor, 15 Braunschweig, Robert, 1W Brodie, G. W. J., 1I Brüning, Stephan, 1C Budnicki, Aleksander, 04 Cai, Jinguang, 0P, 0Z Canfield, Brian K., 1U Chen, Min, 0R Cherif, M., 1F Datta, Anurup, 0U Davis, Lloyd M., 1U De Leo, N., 0A Delmdahl, Ralph, 15 Descrovi, Emiliano, 0A Diener, Romina, 0D Dijoux, Mathieu, 1W Dostovalov, Alexandr V., 1H Ducharme, S., 1X Dultsev, Fedor N., 1H Eckhardt, Sebastian, 11 Ehrhardt, M., 1P Er, Ali O., 1J, 21 Estival, Sébastien, 1W Epperlein, Nadja, 0N Faisst, Birgit, 04 Fassi, Irene, 0F Faucon, Marc, 1G Ferrarese Lupi, F., 0A Fledderus, Henri, 0I, 0J Fraggelakis, F., 13 Frascella, F., 0A Friedrich Schilling, N., 0I Gachot, Carsten, 11 Gemini, Laura, 1G Gong, Qihuang, 0B Graf, Thomas, 06 Grant, Byron, 1J, 21 Günther, Denise, 11 Gurevich, Evgeny L., 1D Hans, Michael, 11 Hartmann, Peter, 1T Hasegawa, Satoshi, 12 Haupt, Oliver, 15 Hayasaki, Yoshio, 12 Höhm, Sandra, 0N Homburg, Oliver, 1C Hoppius, Jan S., 1D Hou, Tingxiu, 0R Hu, Anming, 0R Huang, X., 1X Jarczynski, Manfred, 1C Jin, J., 1I Jonušauskas, Linas, 18 Jumel, J., 1F Kabardiadi-Virkovski, Alexander, 1T Kang, H., 1I Kanitz, Alexander, 1D Karaca, Haluk E., 1J, 21 Kawano, Hiroyuki, 07 Keramatnejad, K., 1X Kholikov, Khomidkhodza, 1J, 21 Kietzig, Anne-Marie, 0X, 1R Kirner, Sabrina V., 0N Kling, Rainer, 13, 1F, 1G Klotzbach, Udo, 0I, 0J Korolkov, Victor P., 1H Krüger, Jörg, 0N Krupop, Benjamin, 14 Kuntze, Thomas, 0J Kunze, Tim, 11, 14 Kupisiewicz, Axel, 1W Lang, Valentin, 0T, 11 Lasagni, Andrés Fabián, 0T, 11, 14, 19, 1T Laygue, Pierre, 1W Li, D. W., 1X Li, Peizhen, 1J, 21 Li, Ruozhou, 0R Li, Yan, 0B Liu, Lipu, 0B Lopez, J., 13 Lorenz, P., 1P Loumena, C., 1F Lu, Y. F., 1X Lv, Chao, 0P MacMillan, F. J., 1I Malinauskas, Mangirdas, 18 Manek-Hönninger, Inka, 13 Mangang, Melanie, 0E Martin, Paul-Etienne, 1W Martínez Vázquez, Rebeca, 0F Matus, Luke, 1R Matylitsky, Victor, 05 Maurer, Erich, 04 Midorikawa, Katsumi, 07 Minardi, Stefano, 0D Mincuzzi, G., 13 Mitra, Thomas, 1C Mücklich, Frank, 11 Nemykin, Anton V., 1H Neugebauer, Christoph, 04 Nolte, Stefan, 0D Okotrub, Konstantin A., 1H Osellame, Roberto, 0F Ostendorf, Andreas, 1D Pfleging, Wilhelm, 0E, 0M, 0S Pirani, F., 0A Rabiee Golgir, H., 1X Rakebrandt, J.-H., 0M, 0S Rank, Andreas, 0T Ricciardi, S., 0A Rimselis, Gabrielius, 18 Rizzo, R., 0A Roch, Teja, 11 Romoli, Luca, 1G Rosenfeld, Arkadi, 0N Rosenkranz, Andreas, 11 Rößler, Florian, 14 Salem, A., 0I Scholz, Steffen G., 0E Seifert, H. J., 0M, 0S Serien, Daniela, 07 Seyitliyev, Dovletgeldi, 1J, 21 Sima, Felix, 07 Simpson, M. C., 1I Smyrek, P., 0M, 0S Song, J. F., 1X Spaltmann, Dirk, 0N Sugioka, Koji, 07 Tabacchi, Gloria, 0D Taleb Ali, M., 1F Terentiev, Vadim S., 1H Thomas, Zachary, 1J Trinh, Kim E., 11 Trotta, Gianluca, 0F Varapnickas, Simonas, 18 Volpe, Annalisa, 0F Wang, Shutong, 0R Watanabe, Akira, 0P, 0Z Weber, Rudolf, 06 Wollmann, Philipp, 0J Wu, Dong, 07 Xu, Jian, 07 Xu, Xianfan, 0U Yang, Dong, 0B Yang, Hong, 0B Yoshiki, Keisuke, 1K Yu, Yongchao, 0R Zagoranskiy, I., 1P Zahedi, Ehsan, 06 Zhang, Qian, 0B Zheng, Y., 0M, 0S Zhou, Y. S., 1X Zimmer, K., 1P Zwahr, Christoph, 14 Conference CommitteeSymposium Chairs Symposium co-Chairs
Program Track Chairs
Conference Chair Conference Co-chairs Conference Program Committee
Session Chairs
IntroductionResearch in laser-based micro- and nanoprocessing has great potential for a broad range of application across various sectors including mechanical engineering, photonics and electrical engineering, vehicle and aerospace component manufacturing, and other functional device manufacturing industries. Furthermore, both the medical device and biotechnology industries benefit from micro- and nanoprocessing components to enter new markets for the coming years. The conference “Laser-based Micro- and Nanoprocessing XI” (for historical reasons, LBMP XI for short) was held 31 January – 2 February, as a part of LASE 2017 at Photonics West in San Francisco, California, United States. This volume contains both invited and contributed papers from Austria, Belgium, Brazil, Canada, China, France, Germany, Italy, Japan, Lithuania, Netherlands, New Zealand, Romania, the Russian Federation, Sweden, and the United States. Our conference focused on transitioning research and development results into different applications. We saw increasing demand for innovations in nano- and microsystem technologies, beam propagation and shaping to support product development in mechanical engineering, photonics and electrical engineering, bio- and medical device engineering industries, etc. Laser technology in particular offered great potential with ultrashort pulse lasers and highly dynamic and high-speed laser beam control systems for a diverse range of applications. We would like to highlight innovations in processing including large area micro/nano structuring, laser interference patterning, roll-to-roll processing, hybrid additive and subtractive processing, direct write processing, ablation and surface modification, such as for high performances energy-storage devices, flexible photovoltaics and wearable smart electronic devices, etc. With the global micro-technology companies increasingly focused on biomedical device products, the biomedical/health industry sector remain for many the primary target market. The trend toward ever more miniaturized systems continues; and the technical possibilities with laser-based micro- and nanoprocessing still offer much room to be exploited to move ideas toward products. For example, solutions were offered to create micro- and nano-biomimetic structures for cell migration studies. These structures were fabricated by hybrid subtractive and additive 3D femtosecond laser processing or high throughput laser texturing of antibacterial surfaces on steel or implants. We would like to express our deepest gratitude to the program committee members and the SPIE technical staff for their great efforts during planning and organization of LBMP XI. We would also like to thank the invited speakers and presenters of the contributed papers for their contribution to the success of this conference. Udo Klotzbach Kunihiko Washio Rainer Kling |
