Holographic tracking of quantized intra-film segments during interferometric laser processing of SiOx thin films (Conference Presentation)

Stephen Ho; Matthias Domke; Heinz P. Huber; Peter P. Herman

doi:10.1117/12.2257034

21 April 2017 Holographic tracking of quantized intra-film segments during interferometric laser processing of SiO_x thin films(Conference Presentation)

Stephen Ho, Matthias Domke, Heinz P. Huber, Peter P. Herman

Author Affiliations +

Proceedings Volume 10094, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XVII; 100941B (2017) https://doi.org/10.1117/12.2257034
Event: SPIE LASE, 2017, San Francisco, California, United States

Abstract

Interferometric femtosecond laser processing of thin dielectric films has recently opened the novel approach for quantized nanostructuring from inside the film, driven by the rapid formation of periodic thin nanoscale plasma disks of 20 to 45 nm width, separated on half-wavelength, λ/2nfilm, spacing (refractive index, nfilm). The nano-disk explosions enable intra-film cleaving of subwavelength cavities at single or multiple periodic depths, enabling the formation of intra-film blisters with nanocavities and the digital ejection at fractional film depths with quantized-depth thickness defined by the laser wavelength.

For this paper, the physical mechanisms and ablation dynamics underlying the intra-film cleavage of SiO_x thin films were investigated by laser pump-probe microscopy with high temporal dynamic range recorded in a wide time-frame between 100 fs and 10 μs. The long time scales revealed a new observation method as Newton's Rings (observed <~50 ns) gave way to holographic recording (>~50 ns) of the laser-ablated film fragments. For the first time to our knowledge, the holographic tracking reveals the clustering of large mechanically ejected nano-film planes into distinct speed groups according to the multiple of λ/2nfilm in the film. The observation verifies a new ‘quantized’ form of photo-mechanical laser “lift-off”.

Conference Presentation

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Stephen Ho, Matthias Domke, Heinz P. Huber, and Peter P. Herman "Holographic tracking of quantized intra-film segments during interferometric laser processing of SiO_x thin films(Conference Presentation)", Proc. SPIE 10094, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XVII, 100941B (21 April 2017); https://doi.org/10.1117/12.2257034

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KEYWORDS

Holography

Thin films

Interferometry

Holographic interferometry

Laser processing

Dielectrics

Femtosecond phenomena

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