Ultra-low-loss and broadband mode converters in Si3N4 technology

Jinfeng Mu; Meindert Dijkstra; Michiel de Goede; Yean-Sheng Yong; Sonia M. García-Blanco

doi:10.1117/12.2252706

16 February 2017 Ultra-low-loss and broadband mode converters in Si₃N₄ technology

Jinfeng Mu, Meindert Dijkstra, Michiel de Goede, Yean-Sheng Yong, Sonia M. García-Blanco

Proceedings Volume 10106, Integrated Optics: Devices, Materials, and Technologies XXI; 101060R (2017) https://doi.org/10.1117/12.2252706
Event: SPIE OPTO, 2017, San Francisco, California, United States

Abstract

Si3N4 grown by low pressure chemical vapor deposition (LPCVD) on thermally oxidized silicon wafers is largely utilized for creating integrated photonic devices due to its ultra-low propagation loss and large transparency window (400 nm to 2350 nm). In this paper, an ultra-low-loss and broadband mode converter for monolithic integration of different materials onto the passive Si₃N₄ photonic technology platform is presented. The mode size converter is constructed with a vertically tapered Si₃N₄ waveguide that is then buried by a polymer or an Al₂O₃ waveguide. The influence of the various design parameters on the converter characteristics are investigated. Optimal designs are proposed, in which the thickness of the Si₃N₄ waveguide is tapered from 200 nm to ~40 nm. The calculated losses of the mode converters at 976 nm and 1550 nm wavelengths are well below 0.1 dB for the Si₃N₄-polymer coupler and below 0.3 dB for the Si₃N₄-Al₂O₃ coupler. The preliminary experimental results show good agreement with the design values, indicating that the mode converters can be utilized for the low-loss integration of different materials.

Conference Presentation

Citation Download Citation

Jinfeng Mu, Meindert Dijkstra, Michiel de Goede, Yean-Sheng Yong, and Sonia M. García-Blanco "Ultra-low-loss and broadband mode converters in Si₃N₄ technology", Proc. SPIE 10106, Integrated Optics: Devices, Materials, and Technologies XXI, 101060R (16 February 2017); https://doi.org/10.1117/12.2252706

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