Reliability evaluation of a MEMS scanner

S. Lani; Y. Marozau; M. Dadras

doi:10.1117/12.2252191

20 February 2017 Reliability evaluation of a MEMS scanner

S. Lani, Y. Marozau, M. Dadras

Proceedings Volume 10116, MOEMS and Miniaturized Systems XVI; 1011606 (2017) https://doi.org/10.1117/12.2252191
Event: SPIE OPTO, 2017, San Francisco, California, United States

Abstract

Previously, the realization and closed loop control of a MEMS scanner integrating position sensors made with piezoresistive sensors was presented. It consisted of a silicon compliant membrane with integrated position sensors, on which a mirror and a magnet were assembled. This device was mounted on a PCB containing coils for electromagnetic actuation. In this work, the reliability of such system was evaluated through thermal and mechanical analysis. The objective of thermal analysis was to evaluate the lifetime of the MEMS scanner and is consisting of temperature cycling (-40°C to 100°C) and accelerated electrical endurance (100°C with power supplied to all electrical components). The objective of mechanical analysis was to assess the resistance of the system to mechanical stress and is consisting of mechanical shock and vibration. A high speed camera has been used to observe the behavior of the MEMS scanner. The use of shock stopper to improve the mechanical resistance has been evaluated and had demonstrated a resistance increase from 250g to 900g. The minimum shock resistance required for the system is 500g for transportation and 1000g for portative devices.

Conference Presentation

Citation Download Citation

S. Lani, Y. Marozau, and M. Dadras "Reliability evaluation of a MEMS scanner", Proc. SPIE 10116, MOEMS and Miniaturized Systems XVI, 1011606 (20 February 2017); https://doi.org/10.1117/12.2252191

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available