Influence of oxygen on the quality of the PZT thin films prepared by IBS

Petra Horodyska; Jiri Hlubucek; Karel Zidek; Jan Vaclavik

doi:10.1117/12.2257224

11 November 2016 Influence of oxygen on the quality of the PZT thin films prepared by IBS

Petra Horodyska, Jiri Hlubucek, Karel Zidek, Jan Vaclavik

Proceedings Volume 10151, Optics and Measurement International Conference 2016; 1015117 (2016) https://doi.org/10.1117/12.2257224
Event: Optics and Measurement 2016 International Conference, 2016, Liberec, Czech Republic

Abstract

Pb(Zr,Ti)O3 (PZT) is a ferroelectric material interesting for its high dielectric constant and piezoelectric response. PZT thin films can be prepared by various methods, e.g. pulsed laser deposition, chemical vapor deposition, sol-gel and, most frequently, sputtering. Though the magnetron sputtering is used more frequently, PZT thin films can be prepared also by ion-beam sputtering (IBS). In this paper we study the deposition process of PZT thin films in our IBS system with a possibility of ion-beam assisted deposition (IBAD), which has the advantage that more energy can be added to the growing layer. We show how in our system the resulting layers, mainly their quality, the Pb content, which is important for the creation of the perovskite crystal structure, and the resulting crystal structure are influenced by the oxygen flux during the deposition for the samples grown on the silicon substrate with and without an intermediate Ti seeding layer.

Citation Download Citation

Petra Horodyska, Jiri Hlubucek, Karel Zidek, and Jan Vaclavik "Influence of oxygen on the quality of the PZT thin films prepared by IBS", Proc. SPIE 10151, Optics and Measurement International Conference 2016, 1015117 (11 November 2016); https://doi.org/10.1117/12.2257224

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available