Study of thin film thickness measurement based on white light interference

Yuanbo Zheng; Chunxiao Chu; Xia Wang

doi:10.1117/12.2257412

28 February 2017 Study of thin film thickness measurement based on white light interference

Yuanbo Zheng, Chunxiao Chu, Xia Wang

Proceedings Volume 10256, Second International Conference on Photonics and Optical Engineering; 102562D (2017) https://doi.org/10.1117/12.2257412
Event: Second International Conference on Photonics and Optical Engineering, 2016, Xi'an, China

Abstract

One method for measuring thin film thickness was proposed in this paper, which based on white light interference. One parallel flat crystal was used to be the standard glass, and put another glass on it, to form one air wedge between them. The reflectance spectrum of two beams interference was measured by one spectrometer. By fitting the reflectance spectrum, wave numbers corresponding to every peak can be found, then using two beam interference theory, the air gap thickness at light incident point can be fitted. By measuring the air gap thickness at different positions, the flatness of measured surface also can be analyzed.

Citation Download Citation

Yuanbo Zheng, Chunxiao Chu, and Xia Wang "Study of thin film thickness measurement based on white light interference", Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 102562D (28 February 2017); https://doi.org/10.1117/12.2257412

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