SEM techniques for materials characterization

Jacques Beauvais; Dominique Drouin; Raynald Gauvin

doi:10.1117/12.279839

30 July 1997 SEM techniques for materials characterization

Jacques Beauvais, Dominique Drouin, Raynald Gauvin

Proceedings Volume 10291, Materials Characterization and Optical Probe Techniques: A Critical Review; 102910B (1997) https://doi.org/10.1117/12.279839
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

The scanning electron microscope (SEM) can be used to study and characterize a wide variety of materials used in photonic applications. These range from highly conductive samples to insulating materials. Several different techniques make use of this versatile tool. These include secondary electron imaging, backscattered electron imaging, X-ray analysis (both qualitative and quantitative), electron channeling patterns for studying crystalline materials, charge collection techniques for semiconductor samples and cathodoluminescence. These techniques will be described here with examples of applications. In addition, electron-matter interactions as well as the basic operation principles of the scanning electron microscope will be discussed.

Citation Download Citation

Jacques Beauvais, Dominique Drouin, and Raynald Gauvin "SEM techniques for materials characterization", Proc. SPIE 10291, Materials Characterization and Optical Probe Techniques: A Critical Review, 102910B (30 July 1997); https://doi.org/10.1117/12.279839

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