Testing micro optics with micro optics

Johannes Pfund; Christian Brock; Ralf Dorn

doi:10.1117/12.2271801

15 June 2017 Testing micro optics with micro optics

Johannes Pfund, Christian Brock, Ralf Dorn

Proceedings Volume 10326, Fourth European Seminar on Precision Optics Manufacturing; 1032609 (2017) https://doi.org/10.1117/12.2271801
Event: Fourth European Seminar on Precision Optics Manufacturing, 2017, Teisnach, Germany

Abstract

An increasing part of the optic industry’s added value consists of micro optical components. This increases the demand for effective test methods for micro optics. When conventional test methods are transferred to micro optics, special attention should to be paid to diffraction effects, wave front propagation and precise sample imaging. We show how a well-established tool – the Shack-Hartmann wave front sensor (SHWFS) – which uses a micro lens array as a key element, can be used for testing micro lenses. Different measurement configurations for transmitted light and reflected light testing are discussed. A system which takes advantage of a combination of these test configurations to retrieve information on surface quality, wave front performance, focal length, and defects is presented. Measurement results are shown to demonstrate the system performance.

Citation Download Citation

Johannes Pfund, Christian Brock, and Ralf Dorn "Testing micro optics with micro optics", Proc. SPIE 10326, Fourth European Seminar on Precision Optics Manufacturing, 1032609 (15 June 2017); https://doi.org/10.1117/12.2271801

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