Effect of elastic region nanoparticle SiO2 jet polishing on the laser damage properties of fused silica

Jialiang Song; Feng Shi; Qi Xiao; Ping Yang

doi:10.1117/12.2272537

1 August 2017 Effect of elastic region nanoparticle SiO₂ jet polishing on the laser damage properties of fused silica

Jialiang Song, Feng Shi, Qi Xiao, Ping Yang

Proceedings Volume 10339, Pacific Rim Laser Damage 2017: Optical Materials for High-Power Lasers; 103392E (2017) https://doi.org/10.1117/12.2272537
Event: Pacific Rim Laser Damage 2017: Optical Materials for High Power Lasers, 2017, Shanghai, China

Abstract

To further improve the laser-induced damage threshold of fused silica elements after Hydrogen Fluoride (HF) acid dynamic acid etching, the effect of the nanoparticle SiO₂ jet polishing on the surface quality and laser damage properties of fused silica was studied. On the fused silica surface after HF acid dynamic etching, different depths were polished with nanoparticle SiO₂ jet, and their surface roughness were measured by In-situ detection. The photothermal absorption, laser damage threshold and surface contamination element concentration at different depths were measured. The experimental results show that the RMS value of the surface roughness of the surface is reduced from 1.440nm to 0.507nm, and surface contamination elements are removed. The laser damage threshold is improved by 10%. The results show that nanoparticle SiO₂ jet polishing can remove surface damage and contamination after HF acid dynamic etching on the basis of elastic processing. Therefore, laser damage threshold can be improved.

Citation Download Citation

Jialiang Song, Feng Shi, Qi Xiao, and Ping Yang "Effect of elastic region nanoparticle SiO₂ jet polishing on the laser damage properties of fused silica", Proc. SPIE 10339, Pacific Rim Laser Damage 2017: Optical Materials for High-Power Lasers, 103392E (1 August 2017); https://doi.org/10.1117/12.2272537

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