Kinematic Transmission Design For The Atomic Resolution Measuring Machine (ARMM)

Debra L. Thurston; Alexander H. Slocum

doi:10.1117/12.950974

1 May 1989 Kinematic Transmission Design For The Atomic Resolution Measuring Machine (ARMM)

Debra L. Thurston, Alexander H. Slocum

Proceedings Volume 1036, Precision Instrument Design; (1989) https://doi.org/10.1117/12.950974
Event: SPIE Advanced Processing Technologies for Optical and Electronic Devices (colocated wth OPTCON), 1988, Santa Clara, CA, United States

Abstract

Minimizing alignment induced errors between an actuator and bearing so as not to induce wear and error into the system can often be achieved only via the use of kinematic transmission elements. A taught wire attached to the platten and grabbed in the middle by the actuator is the simplest form of a kinematic transmission system and provides the greatest error attenuation of the compliant type kinematic transmissions; however, it is also the most axially compliant. To increase the apparent axial stiffness, one can measure the position of the platten at the points where the wire is attached to the platten and where the actuator is attached to the wire. The stretch of the wire can then be determined and compensated for with the motion of the actuator if the latter has suitable bandwidth.

Citation Download Citation

Debra L. Thurston and Alexander H. Slocum "Kinematic Transmission Design For The Atomic Resolution Measuring Machine (ARMM)", Proc. SPIE 1036, Precision Instrument Design, (1 May 1989); https://doi.org/10.1117/12.950974

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