Optical mapping of surface roughness by implementation of a spatial light modulator

Laura Aulbach; Franziska Pöller; Min Lu; Shengjia Wang; Alexander W. Koch

doi:10.1117/12.2270548

23 August 2017 Optical mapping of surface roughness by implementation of a spatial light modulator

Laura Aulbach, Franziska Pöller, Min Lu, Shengjia Wang, Alexander W. Koch

Proceedings Volume 10373, Applied Optical Metrology II; 103730E (2017) https://doi.org/10.1117/12.2270548
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

It is well-known that the surface roughness of materials plays an important role in the operation and performance of technological systems. The roughness influences key parameters, such as friction and wear, and is directly connected to the functionality and durability of the respective system. Tactile methods are widely used for the measurement of surface roughness, but a destructive measurement procedure and the lack of feasibility of online monitoring are crucial drawbacks. In the last decades, several non-contact, usually optical systems for surface roughness measurements have been developed, e.g., white light interferometry, light scatter analysis, or speckle correlation. These techniques are in turn often unable to assign the roughness to a certain surface area or involve inappropriate adjustment procedures. One promising and straightforward optical measurement method is the surface roughness measurement by analyzing the fringe visibility of an interferometric fringe pattern. In our work, we employed a spatial light modulator in the interferometric setup to vary the fringe visibility and provide a stable and reliable measurement system. In previous research, either the averaged fringe visibility or the fringe visibility along a defined observation profile were analyzed. In this article, the analysis of the fringe visibility is extended to generate a complete roughness map of the measurement target. Thus, surface defects or areas of different roughness can be easily located.

Citation Download Citation

Laura Aulbach, Franziska Pöller, Min Lu, Shengjia Wang, and Alexander W. Koch "Optical mapping of surface roughness by implementation of a spatial light modulator", Proc. SPIE 10373, Applied Optical Metrology II, 103730E (23 August 2017); https://doi.org/10.1117/12.2270548

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KEYWORDS

Fringe analysis

Surface roughness

Visibility

Analytical research

Interferometry

Optical testing

Metrology

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