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23 August 2017 Geometrical error calibration in reflective surface testing based on reverse Hartmann test
Zhidong Gong, Daodang Wang, Ping Xu, Chao Wang, Rongguang Liang, Ming Kong, Jun Zhao, Linhai Mo, Shuhui Mo
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Proceedings Volume 10373, Applied Optical Metrology II; 103730K (2017) https://doi.org/10.1117/12.2268372
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States
Abstract
In the fringe-illumination deflectometry based on reverse-Hartmann-test configuration, ray tracing of the modeled testing system is performed to reconstruct the test surface error. Careful calibration of system geometry is required to achieve high testing accuracy. To realize the high-precision surface testing with reverse Hartmann test, a computer-aided geometrical error calibration method is proposed. The aberrations corresponding to various geometrical errors are studied. With the aberration weights for various geometrical errors, the computer-aided optimization of system geometry with iterative ray tracing is carried out to calibration the geometrical error, and the accuracy in the order of subnanometer is achieved.
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Zhidong Gong, Daodang Wang, Ping Xu, Chao Wang, Rongguang Liang, Ming Kong, Jun Zhao, Linhai Mo, and Shuhui Mo "Geometrical error calibration in reflective surface testing based on reverse Hartmann test", Proc. SPIE 10373, Applied Optical Metrology II, 103730K (23 August 2017); https://doi.org/10.1117/12.2268372
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KEYWORDS
Calibration
Deflectometry
Ray tracing
Reverse modeling
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