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We present a compact, all solid-state THz confocal microscope operating at 0.30 THz that achieves super-resolution by using the knife-edge scan approach. In the final reconstructed image, a lateral resolution of 60 μm ≈ λ/17 is demonstrated when the knife-edge is deep in the near-field of the sample surface. When the knife-edge is lifted up to λ/4 from the sample surface, a certain degree of super-resolution is maintained with a resolution of 0.4 mm, i.e. more than a factor 2 if compared to the diffraction-limited scheme. The present results open an interesting path towards super-resolved imaging with in-depth information that would be peculiar to THz microscopy systems.
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V. Giliberti, M. Flammini, C. Ciano, E. Pontecorvo, E. Del Re, M. Ortolani, "Super-resolved terahertz microscopy by knife-edge scan," Proc. SPIE 10383, Terahertz Emitters, Receivers, and Applications VIII, 103830P (23 August 2017); https://doi.org/10.1117/12.2273796