Application of white-light phase-shifting in white-light scanning interferometry

Yujing Wu; Chunkan Tao; Weiyi Wang; Yijun Zhang; Yunsheng Qian

doi:10.1117/12.2272858

19 September 2017 Application of white-light phase-shifting in white-light scanning interferometry

Yujing Wu, Chunkan Tao, Weiyi Wang, Yijun Zhang, Yunsheng Qian

Proceedings Volume 10396, Applications of Digital Image Processing XL; 1039628 (2017) https://doi.org/10.1117/12.2272858
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

A method that combines scanning white-light interferometry with phase-shifting interferometry is proposed. The best-focus scanning position of correlograms is located by calculating the maximum modulation contrast, and the twice averaging four-frame algorithm is utilized to determine the phase difference between the best-focus position and the zero optical path difference point. The surface height is obtained according to the best-focus frame position and the unwrapped phase, which is achieved by a process of removing the phase ambiguity. Both simulated and experimental results demonstrate that the advanced method can achieve the advantages of high precision, large dynamic range, and be insensitive to the phase shifting deviation.

Citation Download Citation

Yujing Wu, Chunkan Tao, Weiyi Wang, Yijun Zhang, and Yunsheng Qian "Application of white-light phase-shifting in white-light scanning interferometry", Proc. SPIE 10396, Applications of Digital Image Processing XL, 1039628 (19 September 2017); https://doi.org/10.1117/12.2272858

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