Flexible thermistors: MCNO films with low resistivity and high TCR deposited on flexible organic sheets by RF magnetron sputtering

Jing Wu; Zhiming Huang; Lin Jiang; Yanqing Gao; Wei Zhou; Junhao Chu

doi:10.1117/12.2273255

30 August 2017 Flexible thermistors: MCNO films with low resistivity and high TCR deposited on flexible organic sheets by RF magnetron sputtering

Jing Wu, Zhiming Huang, Lin Jiang, Yanqing Gao, Wei Zhou, Junhao Chu

Author Affiliations +

Proceedings Volume 10403, Infrared Remote Sensing and Instrumentation XXV; 104030C (2017) https://doi.org/10.1117/12.2273255
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

Mn-Co-Ni-O (MCNO) flexible thermistors are fabricated on polyethylene terephthalate or polyimide sheets by RF magnetron sputtering method at room temperature. The whole fabricating processes is completed at room temperature. The temperature coefficient of resistance (TCR) is -3.1% and resistivity as low as 110Ωcm at 295K. The bendingstraightening cycle test indicates the flexible MCNO sheet is stable. The temperature sensing test shows the thermistors respond to temperature change rapidly and sensitively. Due to the heat-treat free process, high TCR and moderate resistivity features, the technique we provide here allows a convenient and low cost industrial manufacture of high performance flexible thermistors and wide band infrared detectors.

Conference Presentation

Citation Download Citation

Jing Wu, Zhiming Huang, Lin Jiang, Yanqing Gao, Wei Zhou, and Junhao Chu "Flexible thermistors: MCNO films with low resistivity and high TCR deposited on flexible organic sheets by RF magnetron sputtering", Proc. SPIE 10403, Infrared Remote Sensing and Instrumentation XXV, 104030C (30 August 2017); https://doi.org/10.1117/12.2273255

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available