Paper
16 October 2017 The broad utility of Trizac diamond tile
John I. Gagliardi, Vincent D. Romero, Bruce Sventek, Lijun Zu
Author Affiliations +
Proceedings Volume 10448, Optifab 2017; 104480E (2017) https://doi.org/10.1117/12.2277614
Event: SPIE Optifab, 2017, Rochester, New York, United States
Abstract
Sample finishing data from a broad range of materials — glasses, sapphire, silicon carbide, silicon, zirconium oxide, lithium tantalate, and flooring materials — are shown effectively processed with Trizact™ Diamond Tile (TDT). This data should provide the reader with an understanding of what to expect when using TDT on hard to grind or brittle materials. Keys to maintaining effective TDT pad wear rates, and therefore cost effect and stable processes, are described as managing 1) the proper lubricant flow rate for glasses and silicon-type materials and 2) the conditioning particle concentration for harder-to-grind materials
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John I. Gagliardi, Vincent D. Romero, Bruce Sventek, and Lijun Zu "The broad utility of Trizac diamond tile", Proc. SPIE 10448, Optifab 2017, 104480E (16 October 2017); https://doi.org/10.1117/12.2277614
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KEYWORDS
Silicon carbide

Glasses

Diamond

Sapphire

Silicon

Zirconium dioxide

Polishing

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