Modeling and simulation of corner-cube reflector: effect on coaxiality detection accuracy

Ge Song; Junfeng Han; Ping Ruan; Yue Wang; Furui Zhang

doi:10.1117/12.2285499

24 October 2017 Modeling and simulation of corner-cube reflector: effect on coaxiality detection accuracy

Ge Song, Junfeng Han, Ping Ruan, Yue Wang, Furui Zhang

Proceedings Volume 10462, AOPC 2017: Optical Sensing and Imaging Technology and Applications; 1046248 (2017) https://doi.org/10.1117/12.2285499
Event: Applied Optics and Photonics China (AOPC2017), 2017, Beijing, China

Abstract

When the four-quadrant detector is detected using the pyramidal prism to reflect the light, the dihedral angle error causes the spot offset. In this paper, the relationship between the reflection spot offset and the three dihedral angle errors is analyzed by combining the pyramid model with the detector detection principle, and the influence of the dihedral angle error on the center shift of the reflected light spot is explored qualitatively and quantitatively. The simulation results show a high degree of central symmetry, which can be used to eliminate the system error resulting from the dihedral angle error of the corner prism, in order to minimize detection accuracy to 0.1μm. In addition, The simulation results provide a theoretical basis for the subsequent coaxial accuracy test.

Citation Download Citation

Ge Song, Junfeng Han, Ping Ruan, Yue Wang, and Furui Zhang "Modeling and simulation of corner-cube reflector: effect on coaxiality detection accuracy", Proc. SPIE 10462, AOPC 2017: Optical Sensing and Imaging Technology and Applications, 1046248 (24 October 2017); https://doi.org/10.1117/12.2285499

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