Rapid prototyping of 2D glass microfluidic devices based on femtosecond laser assisted selective etching process

Sung-Il Kim; Jeongtae Kim; Chiwan Koo; Yeun-Ho Joung; Jiyeon Choi

doi:10.1117/12.2291160

19 February 2018 Rapid prototyping of 2D glass microfluidic devices based on femtosecond laser assisted selective etching process

Sung-Il Kim, Jeongtae Kim, Chiwan Koo, Yeun-Ho Joung, Jiyeon Choi

Author Affiliations +

Proceedings Volume 10522, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XVIII; 105221V (2018) https://doi.org/10.1117/12.2291160
Event: SPIE LASE, 2018, San Francisco, California, United States

Abstract

Microfluidics technology which deals with small liquid samples and reagents within micro-scale channels has been widely applied in various aspects of biological, chemical, and life-scientific research. For fabricating microfluidic devices, a silicon-based polymer, PDMS (Polydimethylsiloxane), is widely used in soft lithography, but it has several drawbacks for microfluidic applications. Glass has many advantages over PDMS due to its excellent optical, chemical, and mechanical properties. However, difficulties in fabrication of glass microfluidic devices that requires multiple skilled steps such as MEMS technology taking several hours to days, impedes broad application of glass based devices. Here, we demonstrate a rapid and optical prototyping of a glass microfluidic device by using femtosecond laser assisted selective etching (LASE) and femtosecond laser welding. A microfluidic droplet generator was fabricated as a demonstration of a microfluidic device using our proposed prototyping. The fabrication time of a single glass chip containing few centimeter long and complex-shaped microfluidic channels was drastically reduced in an hour with the proposed laser based rapid and simple glass micromachining and hermetic packaging technique.

Citation Download Citation

Sung-Il Kim, Jeongtae Kim, Chiwan Koo, Yeun-Ho Joung, and Jiyeon Choi "Rapid prototyping of 2D glass microfluidic devices based on femtosecond laser assisted selective etching process", Proc. SPIE 10522, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XVIII, 105221V (19 February 2018); https://doi.org/10.1117/12.2291160

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