Dimensional stability validation and sensor calibration with sub-nanometer accuracy

Dirk Voigt; Rob H. Bergmans

doi:10.1117/12.2309057

20 November 2017 Dimensional stability validation and sensor calibration with sub-nanometer accuracy

Dirk Voigt, Rob H. Bergmans

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Proceedings Volume 10564, International Conference on Space Optics — ICSO 2012; 105643K (2017) https://doi.org/10.1117/12.2309057
Event: International Conference on Space Optics 2012, 2012, Ajaccio, Corsica, France

Abstract

We report on the development of measurement facilities for the calibration of ultra-precision displacement sensors and for the dimensional stability validation of materials, joint structures and sensors. A Fabry-Pérot interferometer and a double-ended heterodyne interferometer are discussed, both with a dedicated design aiming for sub-nanometer displacement measurement accuracy.

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Dirk Voigt and Rob H. Bergmans "Dimensional stability validation and sensor calibration with sub-nanometer accuracy", Proc. SPIE 10564, International Conference on Space Optics — ICSO 2012, 105643K (20 November 2017); https://doi.org/10.1117/12.2309057

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