Study of µDBO overlay target size reduction for application broadening

Victor Calado; Jérôme Dépré; Clément Massacrier; Sergey Tarabrin; Richard van Haren; Florent Dettoni; Régis Bouyssou; Christophe Dezauzier

doi:10.1117/12.2297673

13 March 2018 Study of μDBO overlay target size reduction for application broadening

Victor Calado, Jérôme Dépré, Clément Massacrier, Sergey Tarabrin, Richard van Haren, Florent Dettoni, Régis Bouyssou, Christophe Dezauzier

Author Affiliations +

Proceedings Volume 10585, Metrology, Inspection, and Process Control for Microlithography XXXII; 1058507 (2018) https://doi.org/10.1117/12.2297673
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

With these proceedings we present μ-diffraction-based overlay (μDBO) targets that are well below the currently supported minimum size of 10×10 μm² . We have been capable of measuring overlay targets as small as 4×4 μm² with our latest generation YieldStar system. Furthermore we find an excellent precision (TMU < 0.33 nm for 6 × 6 μm² ) without any compromise on throughput (MAM time < 60 ms). At last a study that compares four generations of YieldStar systems show clearly that the latest generation YieldStar systems is much better capable of reading small overlay targets such that the performance of a 16 × 16 μm² on an early generation YieldStar 2nd-gen is comparable to that of a 8 × 8 μm² on the latest YieldStar 5th-gen. This work enables a smaller metrology footprint, more placement flexibility and in-die overlay metrology solutions.

Citation Download Citation

Victor Calado, Jérôme Dépré, Clément Massacrier, Sergey Tarabrin, Richard van Haren, Florent Dettoni, Régis Bouyssou, and Christophe Dezauzier "Study of μDBO overlay target size reduction for application broadening", Proc. SPIE 10585, Metrology, Inspection, and Process Control for Microlithography XXXII, 1058507 (13 March 2018); https://doi.org/10.1117/12.2297673

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available