Programmed LWR metrology by multi-techniques approach

Jérôme Reche; Maxime Besacier; Patrice Gergaud; Yoann Blancquaert; Guillaume Freychet; Thibault Labbaye

doi:10.1117/12.2292169

13 March 2018 Programmed LWR metrology by multi-techniques approach

Jérôme Reche, Maxime Besacier, Patrice Gergaud, Yoann Blancquaert, Guillaume Freychet, Thibault Labbaye

Proceedings Volume 10585, Metrology, Inspection, and Process Control for Microlithography XXXII; 105850F (2018) https://doi.org/10.1117/12.2292169
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

Nowadays, roughness control presents a huge challenge for the lithography step. For advanced nodes, this morphological aspect reaches the same order of magnitude than the Critical Dimension. Hence, the control of roughness needs an adapted metrology. In this study, specific samples with designed roughness have been manufactured using e-beam lithography. These samples have been characterized with three different methodologies: CD-SEM, OCD and SAXS. The main goal of the project is to compare the capability of each of these techniques in terms of reliability, type of information obtained, time to obtain the measurements and level of maturity for the industry.

Conference Presentation

Citation Download Citation

Jérôme Reche, Maxime Besacier, Patrice Gergaud, Yoann Blancquaert, Guillaume Freychet, and Thibault Labbaye "Programmed LWR metrology by multi-techniques approach", Proc. SPIE 10585, Metrology, Inspection, and Process Control for Microlithography XXXII, 105850F (13 March 2018); https://doi.org/10.1117/12.2292169

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