Author Affiliations +
Guido Rademaker,1,2 Jonathan Pradelles,1 Stéfan Landis,1 Stephane Rey,1 Anna Golotsvan,3 Anat Marchelli,3 Tal Itzkovich,3 Tetyana Shapoval,4 Ronny Haupt,4 Erwin Slot,5 Guido de Boer,5 Dhara Dave,5 Marco Wieland,5 Laurent Pain1
1CEA-LETI (France)
2Univ. Grenoble Alpes (France)
3KLA-Tencor Israel (Israel)
4KLA-Tencor GmbH (Germany)
5MAPPER Lithography (Netherlands)