Developing a flexible model of electron scattering in solid for charging analysis

Chahn Lee; Toshiyuki Yokosuka; Hideyuki Kazumi

doi:10.1117/12.2297371

13 March 2018 Developing a flexible model of electron scattering in solid for charging analysis

Chahn Lee, Toshiyuki Yokosuka, Hideyuki Kazumi

Proceedings Volume 10585, Metrology, Inspection, and Process Control for Microlithography XXXII; 105852E (2018) https://doi.org/10.1117/12.2297371
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

We have been developing a charging simulator “CHARMs”, which is based on 3D finite element method, to predict the characteristics of signal from charged pattern on surface of semi-conductor during the SEM observation. We have constructed a new flexible model to simulate the in-solid electron scattering by the Langevin equation for “CHARMs”. Our new model can manipulate the size of the diffusion cloud of scattering electron by the parameters of it and calculate ten times faster than the conventional Monte Carlo (MC) method. In addition to that, the model has the possibility to accurately describe the scattering of low energy electron. We also confirmed that the same results of the conventional MC method can be obtained from the simulation model of metal pattern buried in the sample.

Citation Download Citation

Chahn Lee, Toshiyuki Yokosuka, and Hideyuki Kazumi "Developing a flexible model of electron scattering in solid for charging analysis", Proc. SPIE 10585, Metrology, Inspection, and Process Control for Microlithography XXXII, 105852E (13 March 2018); https://doi.org/10.1117/12.2297371

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available